Dielectric Thin Film from Barium Titanate Nanopowders
نویسندگان
چکیده
منابع مشابه
Electrooptic modulation in thin film barium titanate plasmonic interferometers.
We demonstrate control of the surface plasmon polariton wavevector in an active metal-dielectric plasmonic interferometer by utilizing electrooptic barium titanate as the dielectric layer. Arrays of subwavelength interferometers were fabricated from pairs of parallel slits milled in silver on barium titanate thin films. Plasmon-mediated transmission of incident light through the subwavelength s...
متن کاملSputtered Modified Barium Titanate for Thin-Film Capacitor Applications
New apparatus and a new process for the sputter deposition of modified barium titanate thin-films were developed. Films were deposited at temperatures up to 900 °C from a Ba₀.96Ca0.04Ti0.82Zr0.18O₃ (BCZTO) target directly onto Si, Ni and Pt surfaces and characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). Film texture and cryst...
متن کاملThe effect of stress on the dielectric properties of barium strontium titanate thin films
Barium strontium titanate thin films are being developed as capacitors in dynamic random access memories. These films, grown on silicon substrates, are under tensile residual stress. By a converse electrostrictive effect, the in-plane tensile stress reduces the capacitance in the thickness direction of the film. We measured the substrate curvature change upon the removal of the film, and found ...
متن کاملElectrical Properties of Thin-Film Capacitors Fabricated Using High Temperature Sputtered Modified Barium Titanate
Simple thin-film capacitor stacks were fabricated from sputter-deposited doped barium titanate dielectric films with sputtered Pt and/or Ni electrodes and characterized electrically. Here, we report small signal, low frequency capacitance and parallel resistance data measured as a function of applied DC bias, polarization versus applied electric field strength and DC load/unload experiments. Th...
متن کاملAn Investigation of PLD-Deposited Barium Strontium Titanate (BaxSr1-xTiO3) Thin Film Optical Properties
Reflectance and transmittance parameters of pulsed laser deposited barium strontium titanate (BST) were investigated using spectrophotometric methods. Three stoichiometries consisting of BaxSr1−xTiO3 (x = 0.30, 0.40, 0.50) were deposited on glass substrates using oxygen partial pressures of 1.3 Pa ± 0.13 Pa at 500 ̊C. Subsequently, the measured optical parameters were employed to determine the r...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2007
ISSN: 1742-6588,1742-6596
DOI: 10.1088/1742-6596/61/1/001